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Minority Carrier Life Time System

MWR-SIM Lifetime determination is based on measuring photoconductivity decay after pulselight photo-exciting with usage of reflected microwave as probe.It enables repetition and contactless of measurement and does not require specialsurface treatment before measurement or wafer cutting.

Product's Feature


■ Non-contact and non-invasive measurement
■ Portable measure head
■ Materials: Si, Ge
■ Application:
■Material quality control
■Incoming ingot & wafer inspection
■Heavy metal contamination detection inprocessed wafers


 

Technique Specification

Typical Customer:
American,Europe and Asia and so on.